• China has started mass-producing domestically developed deep ultraviolet (DUV) lithography tools, a key step toward reducing reliance on foreign technology.
  • The move aligns with Beijing's push for semiconductor self-sufficiency amid tightening export controls from the US and its allies.
  • Industry insiders say the tools are being deployed in major fabs, though challenges remain in achieving parity with leading-edge equipment.

Domestic DUV Tools Enter Mass Production

China's semiconductor equipment industry has reached a significant milestone: the mass production of homegrown DUV lithography systems, according to people familiar with the matter. The tools, developed by state-backed consortia and private firms, are now being installed in several major foundries, including SMIC, for wafer fabrication.

The development marks a breakthrough in China's long-running effort to build a self-sufficient chip supply chain. DUV lithography is critical for producing chips at mature nodes down to 7nm, used in everything from automotive chips to consumer electronics. “This is about securing the backbone of our semiconductor base,” said an executive at a Chinese toolmaker, speaking on condition of anonymity.

The push comes as Washington expands export controls on advanced chipmaking equipment, restricting access to foreign DUV and extreme ultraviolet (EUV) systems from companies like ASML. The domestic tools, while not yet matching the precision of the latest foreign models, have been validated in pilot lines and are now ramping up to volume production.

In recent weeks, multiple Chinese fabs have placed orders for the locally made scanners, with government procurement mandates requiring a growing share of domestic content in new fab projects, according to analysts. The transition is expected to accelerate as performance improves and costs decline.

Nonetheless, hurdles remain. “The path from mass production to high-yield, advanced-node capability is steep,” warned a semiconductor analyst at a Beijing-based consultancy. “But this is a critical first step that changes the competitive landscape.”

Implications for Supply Chains

The development has immediate implications for global equipment markets. Chinese toolmakers, long viewed as niche players, are now direct competitors in the DUV segment. While leading-edge chip production still relies on foreign tools, the domestic options offer a viable alternative for mature nodes, potentially reshaping procurement strategies in China and beyond.

Efforts to reach ASML for comment were unsuccessful. The company has previously stated that it complies with all applicable export controls.

Correction: An earlier version of this article misstated the wavelength of the domestic DUV tools. They are 193nm immersion systems.