- Business
- LOT VACUUM Co., Ltd. manufactures and sells dry vacuum pumps and related semiconductor manufacturing equipment primarily for the semiconductor, display, solar cell, battery, and chemical industries. The company offers dry vacuum pumps including HD, Dura-Dry, and LD series models for semiconductor CVD, deep trench etch, load lock, transfer, and mild process applications; plasma pre-treatment systems through its subsidiary LOT CES; and customized vacuum solutions featuring proprietary screw technology for handling by-products from harsh processes. It also provides repair services, OLV turbo pumps, and equipment for semiconductors and LCD control.
LOT VACUUM operates through vacuum pump, equipment, and other financial investment segments, serving major customers such as Samsung Electronics and SK Hynix with over 80% market share in Korean semiconductor CVD processes and more than 20,000 units sold worldwide. The company maintains subsidiaries including LOT Vacuum America in the United States for sales and service, and LOT Vacuum Technology in China; it pursues global expansion including plans for Austin, North America. Founded in 2002 and headquartered in Osan-si, Gyeonggi-do, South Korea, the firm listed on KOSDAQ in 2005 and relocated to a consolidated office building in Osan in 2019.
Recent developments include ongoing expansion of product lines for semiconductor processes, secondary batteries, solar power, nuclear fusion, and next-generation transportation like HyperTubes; commitment to ESG management with average annual growth of 20%; and strategic acquisitions to integrate vacuum pumps into broader semiconductor equipment offerings. The company focuses on R&D for energy-efficient, corrosion-resistant pumps, reduced size, and power outage response to address miniaturization and sustainability demands in ALD and 3D/4D integration. It leverages proximity to customers for rapid service and collaborations with industry leaders to develop customized solutions.