- Business
- Shenzhen CSL Vacuum Science & Technology Co., Ltd. engages in the research, development, manufacture, sale and technical servicing of core components for front-end integrated-circuit manufacturing equipment, principally in China. Its products and solutions include plasma radio-frequency power-supply systems; plasma excitation devices and sources; plasma direct-current power supplies; RF matching and related accessory products; and sourced vacuum-acquisition and fluid-control components. The Company provides integrated core-component solutions supporting plasma processes used in wafer thin-film deposition, plasma etching, lithography, photoresist stripping, ion implantation and bonding equipment. Its customers include semiconductor-equipment manufacturers and wafer-fabrication plants; product deliveries have included supplies to Chinese equipment makers such as Piotech Inc., Advanced Micro-Fabrication Equipment Inc. China, NAURA Technology Group Co., Ltd., Wuxi Lead Intelligent Equipment Co., Ltd. and ACM Research (Shanghai), Inc. The Company operates primarily in China, while also serving overseas markets.
Founded in 2012, Shenzhen CSL Vacuum Science & Technology Co., Ltd. is headquartered in Shenzhen, Guangdong Province, China. The Company is a technology-focused supplier in China’s semiconductor-equipment component industry and has established volume-delivery capabilities for plasma RF power-supply systems. Its business also addresses adjacent industrial applications for vacuum and plasma equipment, including photovoltaic, display-panel and precision-optics markets.
Recent strategic developments include the completion of the Company’s initial public offering and listing on the Shanghai Stock Exchange STAR Market on January 28, 2026, under the ticker 688785. The offering comprised 16.93 million new A shares at CNY92.18 per share and generated net proceeds of approximately CNY1.41 billion. The Company is deploying the proceeds toward an intelligent production and operating base for semiconductor and vacuum-equipment core components; a research and frontier-technology innovation center; semiconductor RF power-system industrialization in Shenyang; marketing and technical-support centers; and working capital. These investments are intended to expand production capacity and product development in areas including low-frequency, high-power plasma RF power supplies, physical-vapor-deposition DC sputtering power supplies and remote plasma sources, while broadening its customer reach beyond semiconductors. In November 2025, the Company also established a wholly owned subsidiary in Germany through outbound direct investment, supporting its international operating expansion.